成像系统和电子束系统均内置在真空柱中。真空柱底端即为右图所示的密封室，用于放置样品。
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When the secondary electrons access and enter the detector, they strike a scintillator (a luminescence product that fluoresces when struck by a billed particle or superior-energy photon).
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e lifted surfaces to receive superior portions of electrons, entering the detector although depressed surfaces have less electrons achieving the surface and hence less electrons enter the detector.
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俄歇电子、特征X射线、背散射电子的产生过程均与样品原子性质有关，所以可以用于成分分析。但由于电子束只能穿透样品表面很浅的一层（参见作用体积），所以只能用于表面分析。
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